For Ag alloy film used for the storage media,it is required to have heat-resistance,anti-constant temperature and anti-constant humidity characteristics,corrosion resistance,while high reflectivity over Al is maintained. An Ag alloy thin film (additive element Pd,Cu,P) was created on glass substrates,and various heat treatment was conducted. Then,fine structure was observed on this thin film using AFM,and fine structure evaluation of the inside was carried out by the in-plane diffractometry and X-ray diffractometry,and in addition,residual stress analysis was carried out. These results were compared and were examined,and fine structure and physical property in a metallic thin film were evaluated,and usefulness of evaluation method was verified.