This document defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The [2] [3] procedure used for the actual analysis is outlined in ISO 22309 and ASTM E1508 and is outside the scope of this document.rd edition 2021-02 Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) Reference number ISO 15632:2021(E) ？ ISO 2021 ISO 15632:2021(E) COPYRIGHT PROTECTED DOCUMENT ？ ISO 標(biāo)準(zhǔn)截圖