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Effect of ambient oxygen pressure on structural, optical and electrical properties of SnO2 thin film Effect of ambient oxygen pressure on structural, optical and electrical properties of SnO2 thin film

Effect of ambient oxygen pressure on structural, optical and electrical properties of SnO2 thin film

  • 期刊名字:稀有金屬
  • 文件大?。?/li>
  • 論文作者:ZHAO Songqing,ZHOU Yueliang,WA
  • 作者單位:Beijing National Laboratory for Condensed Matter Physics,Department of Mathematics and Physics
  • 更新時(shí)間:2023-02-08
  • 下載次數(shù):
論文簡(jiǎn)介

Polycrystalline SnO2 thin films were deposited on sapphire substrates at 450℃ under different ambient oxygen pressures by pulsed laser deposition technique. The effect of ambient oxygen pressure on the structural, optical and electrical properties of SnO2 thin films was studied. X-ray diffraction and Hall measurements show that increasing the ambient oxygen pressure can improve crystallization of the films and decrease resistivity of the films. A violet emission peak centered at 409 nm was observed from photoluminescence measurements for SnO2 films under deposition ambient oxygen pressure above 5 Pa, which is related to the improvement of crystalline of the films.

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