Effect of ambient oxygen pressure on structural, optical and electrical properties of SnO2 thin film
- 期刊名字:稀有金屬
- 文件大?。?/li>
- 論文作者:ZHAO Songqing,ZHOU Yueliang,WA
- 作者單位:Beijing National Laboratory for Condensed Matter Physics,Department of Mathematics and Physics
- 更新時(shí)間:2023-02-08
- 下載次數(shù):次
論文簡(jiǎn)介
Polycrystalline SnO2 thin films were deposited on sapphire substrates at 450℃ under different ambient oxygen pressures by pulsed laser deposition technique. The effect of ambient oxygen pressure on the structural, optical and electrical properties of SnO2 thin films was studied. X-ray diffraction and Hall measurements show that increasing the ambient oxygen pressure can improve crystallization of the films and decrease resistivity of the films. A violet emission peak centered at 409 nm was observed from photoluminescence measurements for SnO2 films under deposition ambient oxygen pressure above 5 Pa, which is related to the improvement of crystalline of the films.
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