In this paper, based on the principle of heat transfer and thermal elastic-plastic theory, the heat treatment process optimization scheme for face gearsis proposed according to the structural characteristics oftheface gear and material properties of 12Cr2Ni4 steel.To simulate the effect of carburizing and quenching process on tooth deformation and residual stress distribution,aheat treatment analysis model of face gearsis established, and the microstructure, stress and deformation of face gear teeth changing with time are analyzed. The simulation results show that face gear tooth hardness increases, tooth surface residual compressive stress increases and tooth deformation decreases after heat treatment process optimization.It is beneficialto improvingthe fatigue strength and performance of face gears.