316L stainless steel samples,as a widespread used material,were irradiated with HIPIB at the beam parameters of ion energy 300 keV,current density 100,200 and 300 A/cm2,shot number 10 and pulse duration 75 ns. The surface morphology and the phase structure in the near surface region of original and treated samples were analyzed with scanning electron microscopy (SEM) and X-ray diffractometry (XRD). It is shown that the HIPIB irradiation can smooth the surface of the samples,and the preferred orientation is present in the surface layer of irradiated coupons. The influence of HIPIB irradiation on the oxidation behavior of 316L stainless steel at 700 ℃ for up to 100 h was investigated. Electron probe microanalysis (EPMA) was used to study the distribution of elements in the oxidation products. It is found that the oxidation behavior of the irradiated coupons depends greatly on the ion current density of HIPIB. HIPIB irradiation with ion current density of 100 A/cm2 slightly reduces the oxidation rate with respect to the unirradiated coupon. The improvement of the oxidation resistance can be attributed to more oxide of Cr that forms on the surface of the irradiated coupons. In contrast,HIPIB irradiation with ion current density of 200 or 300 A/cm2 is proved to be detrimental,causing a higher oxidation rate.