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Effects of Interface and Grain Boundary on the Electrical Resistivity of Cu/Ta Multilayers Effects of Interface and Grain Boundary on the Electrical Resistivity of Cu/Ta Multilayers

Effects of Interface and Grain Boundary on the Electrical Resistivity of Cu/Ta Multilayers

  • 期刊名字:材料科學(xué)技術(shù)學(xué)報(bào)(英文版)
  • 文件大?。?/li>
  • 論文作者:M. Wang,B. Zhang,G.P. Zhang,Q.
  • 作者單位:Shenyang National Laboratory for Materials Science,Key Laboratory for Anisotropy and Texture of Materials of Ministry of
  • 更新時(shí)間:2023-02-08
  • 下載次數(shù):
論文簡(jiǎn)介

The electrical resistivity of Cu/Ta multilayers deposited by radio-frequency magnetron sputtering on a polyimide substrate was investigated as a function of monolayer thickness. It is found that the resistivity of the multilayer increases with decreasing monolayer thickness from 500 nm to 10 nm. Two significant effects of layer interface scattering and grain boundary scattering were identified to dominate electronic transportation behavior in the Cu/Ta multilayers at different length scales. The electrical resistivity of the multilayer with monolayer thickness ranging from nanometer to submicron scales can be well described by a newly-proposed Fuchs-Sandheimair (F-S) and Mayadas-Shatzkes (M-S) combined model.

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