The kinetics of internal oxidation of dilute Cu-Al alloys, containing up to 2.214% molar fraction Al, was investigated over the temperature range of 1023K to 1273K, and the depth of internal oxidation was measured by microscopies. A modified rate equation was derived to describe the kinetics of internal oxidation of Cu-Al alloy plate.Based on the derived equation, the permeability of oxygen in solid copper was obtained from the internal oxidation measurements. The experimental results show that the depth of the internal oxidation is a parabolic function of time, there is no evidence for preferential diffusion along grain boundaries and an outer layer of pure copper was formed on the external surface of samples.