Field emission-scanning electron mieroscopy(FE-SEM) technique was employed to observe the shape,size and distribution of AlN+MnS inclusions in oriented electrical steels. Specimens used for FE-SEM observation were deeply electrolytic etched at room temperature in non-aqueous aeetylaeetone(AA) solution. The results indicate that the FE-SEM technique has obvious advantage in specimen preparation. Therefore, it can be easily used to identify the AlN+MnS inclusions and even copper nano-particles in oriented electrical steels with the same analysis accuracy as that by TEM. This technique is a good substitute for TEM and the associated specimen preparation in the observation of inclusions in electrical steels. It will be a powerful technique for routine analysis in the production of grain oriented electrical steels.